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Course: Thin Film Characterization

Department/Abbreviation: SLO/PGSCH

Year: 2021

Guarantee: 'Mgr. Martin Čada, Ph.D.'

Annotation: The aim is to acquaint students with thin film characterization.

Course review:
Thin film properties Structure and composition Roentgen spectroscopy Electron microprobe Raman spectroscopy SIMS GDOES RBS XPS