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PGSCH
Course: Thin Film Characterization
Department/Abbreviation: SLO/PGSCH
Year: 2020
Guarantee: 'Mgr. Martin Čada, Ph.D.'
Annotation: The aim is to acquaint students with thin film characterization.
Course review:
Thin film properties
Structure and composition
Roentgen spectroscopy
Electron microprobe
Raman spectroscopy
SIMS
GDOES
RBS
XPS