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Course: Preparation and Char. of Phot. Nanostr.

Department/Abbreviation: SLO/PFN

Year: 2020

Guarantee: 'Ing. Štěpán Kment, Ph.D.'

Annotation: The lecture deals with problems of preparation, characterization and properties of thin film structures.

Course review:
- Methods of preparation of thin films: vacuum steaming, arc evaporating, etc. - Application of low-temperature plasma for PVD and PECVD deposition of conducting and dielectric thin layers, physical basics of DC and RF cathode sputtering and reactive sputtering, RF, MF, DC, DC pulse and dual magnetron systems, systems with hollow cathode and plasma channel - Systems for PECVD deposition of thin layers, MW surfatron, ECR plasma, PECVD systems operating under atmospheric pressure, DBD discharge, RF discharge, BTD with flow channel - Properties and characterization of thin-layered structures - Angle-dependent spectral ellipsometry in the region of wavelengths including visible and vacuum-UV region of the spectrum - Phase transitions in thin-layered structures - Dielectric and piezoelectric properties and characterization of thin layers of perovskites - Characterization of mechanical parameters of thin-layered systems by means of nanoindentation, optically-excited surface acoustic waves, etc.